Insulation and passivation properties of vapor-deposited fluorinated polymer thin films

Proceedings of the International Symposium on Electrical Insulating Materials

Volumn , Issue , 2001, Pages 570-573

  Usui, H ^a   Kojima, R ^a   Horie, S ^a   Tanaka, K ^a   Ohishi, F ^a  

^a KANAGAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATION; FLUORINE CONTAINING POLYMERS; IMPURITIES; MICROELECTRONICS; ORGANIC SOLVENTS; PASSIVATION; PERMITTIVITY; PHYSICAL VAPOR DEPOSITION; POLYETHYLENES; SPIN COATING; STRUCTURE (COMPOSITION); THIN FILMS;

FLUORINATED POLYMER THIN FILMS; POLYTETRAFLUOROETHYLENE;

PLASTIC FILMS;

EID: 0035719168     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Effect of substrate temperature on the deposition of polytetrafluoroethylene by an ionization-assisted evaporation method
2. Characteristics of polyetetrafluoroethylene thin films prepared by ionization-assisted deposition
3. A structural study of the conducting defects in fatty acid Langmuir-Blodgett monolayers
4. Analysis of weathering of thermoplastic polyester elastomers. I. Polyether-polyester elastomers
5. Sensitive detection of degradation of modified poly(2,6-dimethyl-1,4-phenylene ether) by dynamic load thermomechanical analysis