Sensors and actuators for intelligent mechatronic systems

IECON Proceedings (Industrial Electronics Conference)

Volumn 1, Issue , 2001, Pages 2062-2065

  Luo, Ren C ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CONTROL SYSTEM SYNTHESIS; INTEGRATED CIRCUIT MANUFACTURE; INTELLIGENT CONTROL; MICROELECTROMECHANICAL DEVICES; RELIABILITY; SENSORS; SILICON;

INTELLIGENT MECHATRONIC SYSTEMS; SIGNAL PROCESSING ELECTRONICS; SILICON INTEGRATED CIRCUIT INDUSTRY;

MECHATRONICS;

EID: 0035694869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Microactuators and micromachines
2. Sensor technologies and microsensor issues for mechatronics systems
3. Computational nanotechnology with carbon nanotubes and fullerenes
4. Nanostructured materials and devices for sensor and electronic applications