Micromachining of SiC by femtosecond laser ablation

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn 2, Issue , 2001, Pages

  Aoki, N ^a   Sugioka, K ^a   Obata, K ^a   Akane, T ^a   Takahashi, T ^a   Cho, S H ^a   Kumagai, H ^a   Toyoda, K ^a   Midorikawa, K ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER ABLATION; MICROMACHINING; SINGLE CRYSTALS; SOLID STATE LASERS;

FEMTOSECOND LASER ABLATION;

SILICON CARBIDE;

EID: 0035694245     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)