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Volumn 308-310, Issue , 2001, Pages 434-437
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Properties of Cr in hydrogenated Si
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Author keywords
Cr; EPR; Hydrogen; Si
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Indexed keywords
ANNEALING;
HIGH TEMPERATURE APPLICATIONS;
HYDROGENATION;
PARAMAGNETIC RESONANCE;
QUENCHING;
SEMICONDUCTOR DOPING;
SILICON;
SPECTRUM ANALYSIS;
MIGRATION ENERGY;
CHROMIUM;
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EID: 0035670958
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(01)00779-7 Document Type: Article |
Times cited : (1)
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References (11)
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