ESR study of Fe-H complexes in Si

Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 445-448

  Takahashi, Toru ^a   Suezawa, Masashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; CHEMICAL POLISHING; CRYSTAL IMPURITIES; ELECTRON SPIN RESONANCE SPECTROSCOPY; HYDROGEN; IRON; SEMICONDUCTOR DOPING; SPECTROMETERS; THERMAL EFFECTS;

ISOCHROMAL ANNEALING; ISOTHERMAL ANNEALING;

SEMICONDUCTING SILICON;

EID: 0033314720     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)00501-3     Document Type: Article

References (10)

1. J.I. Pankove et al., Phys. Rev. Lett. 51 (1983) 2224.
2. P.M. Williams et al., Mater. Sci. Forum 143-147 (1994) 891.
3. M.J. Evans et al., Mater. Res. Soc. Sympo. Proc. 442 (1997) 275.
4. E.O. Sveinbjornsson et al., Phys. Rev. B 49 (1994) 7801.
5. J. Weber, Mater. Res. Soc. Symp. Proc. 513 (1998) 345.
6. T. Sadoh et al., J. Appl. Phys. 82 (1997) 3828.
7. H. Takahashi et al., Phys. Rev. B 46 (1992) 1882.
8. E.R. Weber, Appl. Phys. A 30 (1983) 1.
9. R.C. Newman et al., Solid State Phenom. 32/33 (1993) 155.
10. P. Schwalbach et al., Phys. Rev. Lett. 64 (1990) 1274.