Infrared and Raman analysis of plasma CVD boron nitride thin films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 398-401

  Ben El Mekki, M ^a   Mestres, N ^b   Pascual, J ^a   Polo, M C ^c   Andujar J L ^c  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b CSIC   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Aging; H BN films; Polarized reflectivity; Raman spectroscopy; RF plasma CVD

Indexed keywords

AGING OF MATERIALS; BORON COMPOUNDS; DECOMPOSITION; FILM GROWTH; GLOW DISCHARGES; LIGHT REFLECTION; MICROSTRUCTURE; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; THIN FILMS;

BORON NITRIDE;

PROTECTIVE COATINGS;

EID: 0032613756     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00413-0     Document Type: Article

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