Characterization of arc discharge plasmas in the combined steered arc/unbalanced magnetron deposition process

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2001, Pages 382-387

  Ehiasarian, A P ^a   Macak, K A ^a   Schonjahn C ^a   New, R ^a   Munz W D ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

Adhesion; Arc vaporization; Etching cleaning (plasma); Optical emission (plasma)

Indexed keywords

COATING TECHNIQUES; ELECTRIC ARCS; EMISSION SPECTROSCOPY; ETCHING; INTERFACES (MATERIALS); ION BOMBARDMENT; ION IMPLANTATION; ION SOURCES; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; STRESS ANALYSIS; SURFACE CLEANING;

OPTICAL EMISSION SPECTROSCOPY;

PLASMAS;

EID: 0035655383     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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