Etching microwave silicon [EMSi]-microwave enhanced fast deep anisotropic etching of silicon for micro-electromechanical systems [MEMS]

Sensors and Materials

Volumn 13, Issue 1, 2001, Pages 41-55

  Dziuban, Jan A ^a   Walczak, Rafał ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Anisotropy; Fast; MEMS; Micromachining; Micromechanics; Microwave; Silicon; Wet etching

Indexed keywords

EID: 0035648684     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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