Microwave enhanced fast anisotropic etching of monocrystalline silicon

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 133-138

  Dziuban, Jan A ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; MEMBRANES; MICROMACHINING; SINGLE CRYSTALS; SUBSTRATES;

ANISOTROPIC ETCHING; MONOCRYSTALLINE SILICON;

SILICON SENSORS;

EID: 0034248455     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00373-3     Document Type: Article

References (12)

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