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Volumn 3, Issue , 2001, Pages 2159-2161

Development of titanium nitride coating for SNS ring vacuum chambers

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; IMPURITIES; ION SOURCES; MAGNETRON SPUTTERING; NEUTRON SOURCES; PROTONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY; TITANIUM NITRIDE;

EID: 0035569507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (22)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.