Growth of self-seeded aluminum nitride by sublimation-recondensation and substrate preparation

Materials Research Society Symposium - Proceedings

Volumn 639, Issue , 2001, Pages

  Rojo, J Carlos ^a   Slack, Glen A ^a   Morgan, Kenneth ^a   Schowalter, Leo J ^a   Dudley, Michael ^a  

^a Crystal IS Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; CHEMICAL MECHANICAL POLISHING; CONDENSATION; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; GRAIN GROWTH; SINGLE CRYSTALS; SUBLIMATION; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

RECONDENSATION; X RAY TOPOGRAPHY; X-RAY DOUBLE CRYSTAL DIFFRACTION;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0035559536     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)