PECVD silicon oxide-xerogel and polymer-xerogel waveguides

Materials Research Society Symposium - Proceedings

Volumn 637, Issue , 2001, Pages

  Ponoth, Shom S ^a   Agarwal, Navnit T ^a   Persans, Peter D ^a   Plawsky, Joel L ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; AGING OF MATERIALS; CMOS INTEGRATED CIRCUITS; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROSITY; REFRACTIVE INDEX;

XEROGELS;

POROUS SILICON;

EID: 0035559326     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Low-dielectric constant materials V