Oxide powders for chemical mechanical polishing produced by chemical vapor synthesis

Materials Research Society Symposium - Proceedings

Volumn 671, Issue , 2001, Pages

  Sieger, H ^a   Winterer, M ^a   Keiderling, U ^a   Hahn, H ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ALUMINA; CHEMICAL MECHANICAL POLISHING; DISPERSIONS; PARTICLE SIZE ANALYSIS; SILICA;

AQUEOUS DISPERSIONS; CHEMICAL VAPOR SYNTHESIS; TETRAETHYLORTHOSILICATE;

POWDERS;

EID: 0035558801     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-671-m2.5     Document Type: Conference Paper

References (3)