Structural and micromechanical assessment of electrochemically grown metal layers for Si magnetic microactuators

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages

  Martinez, Susanna ^a   Yaakoubi, Nourdin ^a   Serre, Christophe ^a   Pérez Rodríguez, Alejandro ^a   Morante, Joan Ramon ^a   Díez Pérez, Ismael ^a   Gorostiza, Pau ^a   Esteve, Jaume ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROCHEMISTRY; MICROMACHINING; OPTIMIZATION; SEMICONDUCTING SILICON; SUBSTRATES;

ELECTROCHEMICAL DEPOSITION; MAGNETIC MICROACTUATORS;

MICROACTUATORS;

EID: 0035557111     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)