Pulsed nucleation for ultra-high aspect ratio tungsten plugfill

Advanced Metallization Conference (AMC)

Volumn , Issue , 2001, Pages 649-654

  Lee, Sang Hyeob ^a   Gonzalez, Luis ^a   Collins, Josh ^a   Ashtiani, Kaihan ^a   Levy, Karl ^a  

^a NOVELLUS SYSTEMS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; IMPURITIES; NANOSTRUCTURED MATERIALS; NUCLEATION; SURFACE ROUGHNESS;

PULSED NUCLEATION;

TUNGSTEN;

EID: 0035555413     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)