Chemical purity of diamond-like films produced by ion-beam deposition

Technical Physics

Volumn 46, Issue 10, 2001, Pages 1303-1306

  Pshenichnyuk, S A ^a   Yumaguzin, Yu M ^b  

^a INSTITUTE OF PHYSICS OF MOLECULES AND CRYSTALS   (Russian Federation)

^b Science and Education Center of Bashkir People History Ufa University of Science and Technology   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035538955     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1412068     Document Type: Article

References (20)

1. Hsiao-chu Tsai and D. B. Bogy, J. Vac. Sci. Technol. A 5 (6), 3287 (1987).
2. V. S. Vavilov, Usp. Fiz. Nauk 167 (1), 17 (1997) [Phys. Usp. 40, 15 (1997)].
3. V. S. Vavilov, Usp. Fiz. Nauk 167 (1), 17 (1997) [Phys. Usp. 40, 15 (1997)].
4. F. J. Himpsel, J. A. Knapp, J. A. van Vechten, and D. E. Eastman, Phys. Rev. B 20, 624 (1979).
5. S. A. Pshenichnyuk, Yu. M. Yumaguzin, and R. Z. Bakhtizin, Pis'ma Zh. Tekh. Fiz. 25 (15), 46 (1999) [Tech. Phys. Lett. 25, 612 (1999)].
6. S. A. Pshenichnyuk, Yu. M. Yumaguzin, and R. Z. Bakhtizin, Pis'ma Zh. Tekh. Fiz. 25 (15), 46 (1999) [Tech. Phys. Lett. 25, 612 (1999)].
7. V. R. Raiko, Diamond Relat. Mater., No. 10, 1063 (1996).
8. J. Wei and Y. Tzeng, J. Cryst. Growth 128, 413 (1993).
9. K. Nishimura, K. Das, and J. T. Glass, J. Appl. Phys. 69, 3142 (1991).
10. B. S. Danilin, Application of Low-Temperature Plasma for Thin Film Deposition (Énergoatomizdat, Moscow, 1989).
11. Methods of Surface Analysis, Ed. by A. W. Czanderna (Elsevier, New York, 1975; Mir, Moscow, 1979).
12. S. A. Pshenichnyuk and Yu. M. Yumaguzin, Pis'ma Zh. Tekh. Fiz. 26 (1), 72 (2000) [Tech. Phys. Lett. 26, 79 (2000)].
13. S. A. Pshenichnyuk and Yu. M. Yumaguzin, Pis'ma Zh. Tekh. Fiz. 26 (1), 72 (2000) [Tech. Phys. Lett. 26, 79 (2000)].
14. S. A. Pshenichnyuk, Yu. M. Yumaguzin, and R. Z. Bakhtizin, Prib. Tekh. Éksp., No. 6, 143 (1998).
15. S. A. Pshenichnyuk, Yu. M. Yumaguzin, and R. Z. Bakhtizin, Poverkhnost, No. 10, 9 (2000).
16. C. F. M. Borges, S. Schelz, L. St.-Ongle, and M. Maisan, J. Appl. Phys. 79 (6), 3290 (1996).
17. S. S. Olevskiǐ, V. P. Repko, and G. V. Aleksandrov, Dokl. Akad. Nauk SSSR 245 (6), 1382 (1979) [Sov. Phys. Dokl. 24, 241 (1979)].
18. S. S. Olevskiǐ, V. P. Repko, and G. V. Aleksandrov, Dokl. Akad. Nauk SSSR 245 (6), 1382 (1979) [Sov. Phys. Dokl. 24, 241 (1979)].
19. É. F. Chaǐkovskiǐ, V. M. Puzikov, and A. V. Semenov, Kristallografiya 26 (1), 245 (1981) [Sov. Phys. Crystallogr. 26, 122 (1981)].
20. É. F. Chaǐkovskiǐ, V. M. Puzikov, and A. V. Semenov, Kristallografiya 26 (1), 245 (1981) [Sov. Phys. Crystallogr. 26, 122 (1981)].