The formation of developed morphology on the indium phosphide surface by ion argon beam sputtering

Technical Physics

Volumn 46, Issue 7, 2001, Pages 892-896

  Soshnikov, I P ^a   Lunev, A V ^a   Gaevskii M E ^a   Nesterov, S I ^a   Kulagina, M M ^a   Rotkina, L G ^a   Barchenko, V T ^b   Kalmykova, I P ^b   Efimov, A A ^b   Gorbenko, O M ^c  

^a IOFFE INSTITUTE   (Russian Federation)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^c INSTITUTE FOR ANALYTICAL INSTRUMENTATION   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035535081     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1387553     Document Type: Article

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