Nanostructure patterns written in polycarbonate by a bent optical fiber probe

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2299-2300

  Chen, Sy Hann ^a,b   Chen, Yung Fu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b National Science Council   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXCIMER LASERS; LITHOGRAPHY; MICROMACHINING; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; OPTICAL FIBERS; SINGLE MODE FIBERS;

BENT OPTICAL FIBER PROBE; ION SPUTTERING; SCANNING PROBE MICROSCOPY;

POLYCARBONATES;

EID: 0035519468     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421555     Document Type: Article

References (10)

1. C. E. Talley, G. A. Cooksey, and R. C. Dunn, Appl. Phys. Lett. 69, 3809 (1996).
2. S.-H. Chen, H.-N. Lin, and C. R. Yang, Rev. Sci. Instrum. 71, 3953 (2000).
3. C. R. Yang, B. C. S. Chou, H. Y. Chou, F. H. H. Lin, W. K. Kuo, R. K. S. Luo, J. W. Chang, and Z. J. Wei, Proc. SPIE 3511, 342 (1998).
4. V. Bouchiat and D. Esteve, Appl. Phys. Lett. 69, 3098 (1996).
5. R. Magno and B. R. Bennett, Appl. Phys. Lett. 70, 1855 (1997).
6. G. A. Valaskovic, M. Holton, and G. H. Morrison, Appl. Opt. 34, 1215 (1995).
7. H.-N. Lin, U. Lewlomphaisarl, S. H. Chen, L. J. Lee, and D. P. Tsai, Rev. Sci. Instrum. 69, 3843 (1998).
8. The brief descriptions of the five parameters are: "HEAT" controls the laser power, "FIL" is the length being scanned by the laser, "VEL" is the velocity when the laser is turned off, "DEL" is the time between the laser turn-off and the second pull, and "PULL" determines the strength of the second pull.
9. S.-H. Chen, H.-H. Lin, and P.-M. Ong, Rev. Sci. Instrum. 71, 3788 (2000).
10. This parameter defines the amplitude of the voltage applied to the piezo-system that drives the cantilever vibration of the fiber probe.