Automated Xe adsorption technique to measure small Brunauer-Emmett-Teller surface area of several square centimeters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2262-2267

  Yanazawa, Hiroshi ^a   Furukawa, Ryoichi ^b   Yamamoto, Satoshi ^b   Suzuki, Isao ^c   Miura, Kazuhisa ^d  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b HITACHI LTD   (Japan)

^c UTSUNOMIYA UNIVERSITY   (Japan)

^d TSUYAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION ISOTHERMS; ANNEALING; COMPUTER SIMULATION; GAS ADSORPTION; MANOMETERS; MORPHOLOGY; NUMERICAL ANALYSIS; SURFACE ROUGHNESS; SURFACE STRUCTURE; XENON;

ADSORPTION CROSS SECTION; AUTOMATED XENON ADSORPTION TECHNIQUE; BRUNAUER-EMMETT-TELLER SURFACE AREA;

SURFACE MEASUREMENT;

EID: 0035519421     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421564     Document Type: Article

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