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Volumn 34, Issue 11, 2001, Pages 1356-1365

Estimation of the methane conversion in a capacitively coupled radio-frequency plasma

Author keywords

Capacitively rf discharge; Conversion; Methane; Modeling; Reaction engineering

Indexed keywords

DECOMPOSITION; FREE RADICALS; GLOW DISCHARGES; MATHEMATICAL MODELS; METHANE; POLYMERIZATION; SENSITIVITY ANALYSIS;

EID: 0035516659     PISSN: 00219592     EISSN: None     Source Type: Journal    
DOI: 10.1252/jcej.34.1356     Document Type: Article
Times cited : (21)

References (22)
  • 14
    • 84984205071 scopus 로고
    • The polymerization of Vinyl monomers. I. The design, construction, and operation of an inductively coupled plasma generator and preliminary studied with nine monomers
    • (1972) J. Appl. Poly. Sci , vol.16 , pp. 2291-2315
    • Thompson, L.F.1    Mayhan, K.G.2
  • 16
    • 0021777989 scopus 로고
    • On the mechanism of decomposition of hard a-C:H films by rf-plasma decomposition of hydrocarbons
    • (1986) Vacuum , vol.36 , pp. 107-109
    • Wendler, B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.