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Volumn 38, Issue 7, 1999, Pages 2540-2547
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Decomposition of methane and carbon dioxide in a radio-frequency discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON DIOXIDE;
DISSOCIATION;
ELECTRON ENERGY LEVELS;
METHANE;
MOLECULES;
PLASMAS;
POLYMERIZATION;
ELECTRON COLLISION;
RADIO FREQUENCY DISCHARGE;
DECOMPOSITION;
CARBON DIOXIDE;
CARBON MONOXIDE;
METHANE;
ARTICLE;
DECOMPOSITION;
DISSOCIATION CONSTANT;
ELECTRON TRANSPORT;
PRESSURE;
RADIOFREQUENCY RADIATION;
REACTION ANALYSIS;
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EID: 0032793659
PISSN: 08885885
EISSN: None
Source Type: Journal
DOI: 10.1021/ie980492c Document Type: Article |
Times cited : (72)
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References (11)
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