Laser probes for the thermal and thermomechanical characterisation of microelectronic devices

Microelectronics Journal

Volumn 32, Issue 10-11, 2001, Pages 891-898

  Claeys, Wilfrid ^a   Dilhaire, Stefan ^a   Jorez, Sébastien ^a   Patiño Lopez, Luis David ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

CCD camera; ESPi; Laser probing method; Shearography; Thermal testing

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; IMAGING TECHNIQUES; INTEGRATED CIRCUITS; INTERFEROMETRY; LASER BEAM EFFECTS; SPECKLE;

LASER PROBES;

MICROELECTRONICS;

EID: 0035480218     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(01)00078-7     Document Type: Article

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