Micromachined accelerometer with area-changed capacitance

Mechatronics

Volumn 11, Issue 7, 2001, Pages 811-819

  Li, Baoqing ^a   Lu, Deren ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Accelerometer; Area changeable; Capacitance

Indexed keywords

ACCELERATION; CAPACITANCE; ELASTICITY; ELECTRODES; MICROMACHINING;

ELASTIC BEAMS; MICROMACHINED ACCELEROMETERS;

ACCELEROMETERS;

EID: 0035480138     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(00)00050-7     Document Type: Article

References (10)

1. Precision accelerometers with μg resolution
2. Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique
3. A surface micromachined silicon accelerometer with on-chip detection circuitry
4. Three-axis capacitive accelerometer with uniform axial sensitivities
5. An integrated force balanced capacitive accelerometer for low-g applications
6. ISAAC: Integrated silicon automotive accelerometer
7. Design and processing experiments of a new miniaturized capacitive triaxial accelerometer
8. A high-sensitivity Z-axis capacitive silicon microaccelerometer with a torsional suspension