Microelectro-mechanical Systems: Technology and Applications

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 282-288

  Bishop, David ^a   Heuer, Arthur ^a   Williams, David ^a  

^a NONE

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EID: 79951679154     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/mrs2001.60     Document Type: Article

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