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Volumn 11, Issue 2-3, 2001, Pages 110-113
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Height control of silicon nano-whiskers embedded in ultra thin silicon nitride layers by rapid thermal annealing
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Author keywords
Ion implantation; Nano whiskers; Rapid annealing; Silicon nanotechnology; Silicon nitride
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Indexed keywords
CHEMICAL BONDS;
ELECTRON BEAMS;
ION IMPLANTATION;
NANOSTRUCTURED MATERIALS;
RAPID THERMAL ANNEALING;
SILICON NITRIDE;
SILICON WAFERS;
STOICHIOMETRY;
ULTRATHIN FILMS;
SILICON NANOTECHNOLOGY;
CRYSTAL WHISKERS;
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EID: 0035474331
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/S1386-9477(01)00185-0 Document Type: Article |
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Times cited : (13)
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References (10)
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