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Volumn 41, Issue 9-10, 2001, Pages 1631-1635
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Reliability studies on multilevel interconnection with intermetal dielectric air gaps
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM ALLOYS;
ASPECT RATIO;
COMPUTER SIMULATION;
DIELECTRIC MATERIALS;
ELASTIC MODULI;
ELECTROMIGRATION;
FAILURE ANALYSIS;
PASSIVATION;
RELIABILITY;
DIELECTRIC AIR GAPS;
INTERCONNECTION NETWORKS;
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EID: 0035457052
PISSN: 00262714
EISSN: None
Source Type: Journal
DOI: 10.1016/S0026-2714(01)00153-6 Document Type: Article |
Times cited : (7)
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References (8)
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