Designing and modelling of a grating-based displacement micro-transducer

Nanotechnology

Volumn 12, Issue 3, 2001, Pages 308-315

  Zhao, Bing ^a,b   Liu, Ai Qun ^c   Chollet, Frank ^a   Miao, JianMin ^a   Xie, HuiMin ^a   Asundi, Anaud ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b TONGJI UNIVERSITY   (China)

^c INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; DIFFRACTION GRATINGS; FOURIER OPTICS; MATHEMATICAL MODELS; SENSORS; TRANSDUCERS;

FOURIER ANALYSIS; GRATING BASED DISPLACEMENT MICRO TRANSDUCER; OPTICAL FLUX; OPTICAL STRUCTURE;

NANOTECHNOLOGY;

EID: 0035443131     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/3/319     Document Type: Conference Paper

References (10)

1. A wide-range linear optical accelerometer
2. Comparative study of novel micromachined accelerometers employing MIDOS
3. High-accuracy translation-rotation encoder with two gratings in a Littrow mount
4. Polysilicon micromechanical gratings for optical modulation
5. Fresnel images of a binary diffraction grating with open ratio 0.5
6. Moiré and fringe projection techniques
7. Moiré fringes