In situ electron spin resonance observation of Si(111) 7×7 surface during hydrogenation process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 5, 2001, Pages 1898-1900

  Futako, Wataru ^a   Nishizawa, Masayasu ^a   Yasuda, Tetsuji ^a   Isoya, Jun Ichi ^b   Yamasaki, Satoshi ^a  

^a JT RES CENTER FOR ATOM TECHNOLOGY   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANNEALING; DESORPTION; HYDROGEN BONDS; HYDROGENATION; PARAMAGNETIC RESONANCE; ULTRAHIGH VACUUM;

ULTRAHIGH-VACUUM (UHV) CHAMBER;

SILICON;

EID: 0035441532     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1403439     Document Type: Article

References (5)

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5. G. Schulze and M. Henzler, Surf. Sci. 124, 336 (1983).