An integrated simulator for coupled domain problems in MEMS

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 379-391

  Kirby, Robert M ^b   Karniadakis, George Em ^b   Mikulchenko, Oleg ^a,c   Mayaram, Kartikeya ^a,c  

^a IEEE

^b BROWN UNIVERSITY   (United States)

^c Oregon State University   (United States)

Author keywords

Coupled domains; Distributed systems; Macro models

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DISTRIBUTED PARAMETER CONTROL SYSTEMS; ELECTRIC PROPERTIES; INTEGRATED CIRCUITS; THERMODYNAMIC PROPERTIES;

CONTROLLED MICROLIQUID DOSING SYSTEM; COUPLED DOMAINS; ELECTRONIC CONTROL; MICROFLUIDIC SIMULATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0035440654     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946788     Document Type: Article

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