Effect of a microwave plasma with electron cyclotron resonance on the electrophysical properties of diamond-like carbon films

Technical Physics Letters

Volumn 22, Issue 3, 1996, Pages 245-247

  Bylinkina, N N ^a   Mushtakova, S P ^a   Oleinik V A ^a   Skripal', A V ^a   Usanov, D A ^a   Ushakov, N M ^a   Ufarov, R K ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030533088     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. R. K. Yafarov, Elektron. Promyshl., No. 1, 8 (1992).
2. V. P. Karamyshev, V. P. Lavrishchev, I. V. Muryleva, and P. V. Panasenko, Mikroelektronika 18, 9 (1989).