Nanoindentation studies of (111) GaAs/InP epilayers

Applied Surface Science

Volumn 180, Issue 1-2, 2001, Pages 119-125

  Navamathavan, R ^a   Arivuoli, D ^a   Attolini, G ^b   Pelosi, C ^b  

^a ANNA UNIVERSITY   (India)

^b CNR   (Italy)

Author keywords

Epilayers; Heterostructures; Mechanical properties; Nanoindentation

Indexed keywords

CRYSTAL ORIENTATION; ELASTIC MODULI; HARDNESS; HETEROJUNCTIONS; METALLORGANIC VAPOR PHASE EPITAXY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR GROWTH;

NANOINDENTATION;

SEMICONDUCTING FILMS;

EID: 0035426504     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00336-1     Document Type: Article

References (16)