Three-dimensional silicon microcomponents manufactured by micro-electro discharge machining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 352-359

  Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Electro discharge machining; Electrode; Manufacturing; Microgears; Micromirror; Microspring; Microsystems; Three dimensional

Indexed keywords

BEVEL GEARS; CONCURRENT ENGINEERING; ELECTRIC DIPOLE MOMENTS; ELECTRIC DISCHARGE MACHINING; ELECTRODES; ELECTROLYSIS; ETCHING; JOB ANALYSIS; LITHOGRAPHY; MACHINING; MICROMACHINING; MICROSTRUCTURE; MICROSYSTEMS; OPTICAL DEVICES; RAPID PROTOTYPING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SPUR GEARS; THREE DIMENSIONAL;

ACCELERATION SENSORS; CONVENTIONAL MACHINING; ELECTRIC FORCES; ELECTRICAL DISCHARGES; ELECTRO DISCHARGES; ELECTRO-DISCHARGE MACHINING; ELECTRODE WEARS; ETCHING TECHNIQUES; HIGH ACCURACIES; INSTALLATION COSTS; LARGE DESIGNS; MACHINING COMPLEXES; MACHINING PARAMETERS; MATERIAL REMOVALS; MICRO COMPONENTS; MICRO MIRRORS; MICROGEARS; MICROMIRROR; MICROSPRING; PRODUCTION TECHNOLOGIES; RELIABLE METHODS; SILICON MICRO COMPONENTS; SMALL SIZES; TOOL ELECTRODES; WORK PIECES;

ELECTRIC DISCHARGES;

EID: 0004499749     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284535     Document Type: Conference Paper

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