A high-performance scintillator-silicon-well X-ray microdetector based on DRIE techniques

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 203-207

  Rocha, J G ^a   Correia, J H ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Digital radiology; DRIE; Micromachining; Scintillator; X ray

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; COMPUTER SIMULATION; LIGHT; MICROMACHINING; PHOSPHORS; PHOTODETECTORS; PHOTONS; RADIOLOGY; REACTIVE ION ETCHING; SUBSTRATES; X RAYS;

DEEP REACTIVE ION ETCHING; DIGITAL RADIOLOGY; SCINTILLATOR CRYSTALS; X RAY MICRODETECTOR;

RADIATION DETECTORS;

EID: 0035425686     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00564-7     Document Type: Article

References (11)

1. Reduction of radiation dose by using digital luminescence radiography compared to conventional screen film system with grid cassette
2. X-ray imaging with semiconductor films
3. X-ray and charged particle detection with CsI(Tl) layer coupled to a α-Si:H photodiode layers
4. New cesium iodide-selenium X-ray detector structure for digital radiography and fluoroscopy
5. Process for producing a scintillator screen
6. An X-ray imaging pixel detector based on a scintillating guides screen
7. Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells
8. Experimental efforts and results in finding new heavy scintillators
9. Physical processes in inorganic scintillators
10. Calculation of photon mass energy-transfer and mass energy-absorption coefficients
11. Current advances and future trends in X-ray digital detectors