3D micro-inspection goes DMD

Optics and Lasers in Engineering

Volumn 36, Issue 2, 2001, Pages 155-167

  Bitte, F ^a   Dussler, G ^a   Pfeifer, T ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

3D surface inspection; Confocal microscope; Digital micromirror device; DMD; Optical metrology

Indexed keywords

IMAGE PROCESSING; PARAMETER ESTIMATION; SCANNING;

DIGITAL MICROMIRROR DEVICES (DMD); OPTICAL METROLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035423954     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00037-9     Document Type: Article

References (16)

1. The need of new devices and methods for quality control and process observation in MEMS
2. Current status and future applications for DMD-based projection displays (invited paper)
3. From ICs to DMDs
4. Pulse width modulation control in DLP projectors
5. Highly accurate non-contact characterization of engineering surfaces using confocal microscopy
6. 3D surface inspection with a DMD based sensor
7. MicroScan: A DMD based optical surface profiler
8. Using a digital micromirror device for three-dimensional micro-inspection
9. Optical metrology for microsystems inspection