MicroScan: A DMD based optical surface profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4093, Issue 1, 2000, Pages 309-318

  Bitte, Frank ^a   Dussler, Gerd ^a   Pfeifer, Tilo ^a   Frankowski, G ^b  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

^b Gottfried Frankowski Messtechnik GmbH   (Germany)

Author keywords

3D surface inspection; Confocal microscope; Digital micromirror device; DMD; MEMS; Optical metrology; Optical scanner

Indexed keywords

MIRRORS; OPTICAL MICROSCOPY; SCANNING;

CONFOCAL MICROSCOPE; DIGITAL MICROMIRROR DEVICES (DMD); OPTICAL METROLOGY; OPTICAL SURFACE PROFILERS; SURFACE INSPECTION;

OPTICAL SYSTEMS;

EID: 0034546730     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.405219     Document Type: Article

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