SCOPUS 정보 검색 플랫폼

Microelectronics Reliability

Volumn 41, Issue 8, 2001, Pages 1255-1258

Scanning thermal microscopy studies of local temperature distribution of micron-sized metallization lines

(6) Ji, Yuan a Li, Ziguo a Wang, Dong a Cheng, Yaohai a Luo, Dong a Zong, Bin a

a BEIJING UNIVERSITY OF TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMIGRATION; IMAGE ANALYSIS; INFRARED RADIATION; METALLIZING; MICROELECTRONIC PROCESSING; MICROSCOPIC EXAMINATION; SURFACE MEASUREMENT; TEMPERATURE MEASUREMENT;

SCANNING THERMAL MICROSCOPY;

TEMPERATURE DISTRIBUTION;

EID: 0035416582 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(00)00245-6 Document Type: Article

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.