Observation of the internal waveforms in high-speed high-density LSIs using an EOS prober

Microelectronics Reliability

Volumn 41, Issue 8, 2001, Pages 1203-1209

  Hashimoto, Chisato ^a   Takizawa, Takamitsu ^b   Nakajima, Sigeru ^a   Shinagawa, Mitsuru ^a   Nagatsuma, Tadao ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROOPTICAL EFFECTS; INTERCONNECTION NETWORKS; ION BEAMS; PROBES; SAMPLING; WAVEFORM ANALYSIS;

ELECTRON BEAM (EB) PROBING; ION BEAM TRIMMING;

LSI CIRCUITS;

EID: 0035416565     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(01)00107-X     Document Type: Article

References (4)

1. A laser-diode-based picosecond electro-optic prober for high-speed LSIs
2. Electro-optic testing technology for high-speed LSIs
3. Improvement of E-beam observability by testing-pad placement in LSI design layout
4. An automated electro-optic probing system for ultra-high-speed ICs