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Volumn 286, Issue 3, 2001, Pages 162-168

Photoluminescence study of Nd:YAG laser-etched silicon

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; NANOSTRUCTURED MATERIALS; NEODYMIUM LASERS; PARTICLE SIZE ANALYSIS; PHOTOLUMINESCENCE;

EID: 0035397951     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00519-1     Document Type: Article
Times cited : (6)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.