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Volumn 286, Issue 3, 2001, Pages 162-168
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Photoluminescence study of Nd:YAG laser-etched silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
NANOSTRUCTURED MATERIALS;
NEODYMIUM LASERS;
PARTICLE SIZE ANALYSIS;
PHOTOLUMINESCENCE;
LASER-INDUCED ETCHING (LIE);
POROUS SILICON;
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EID: 0035397951
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00519-1 Document Type: Article |
Times cited : (6)
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References (23)
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