Optical constants and critical-point parameters of GaAs from 0.73 to 6.60 eV

Journal of Applied Physics

Volumn 90, Issue 1, 2001, Pages 515-517

  Zollner, Stefan ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035396248     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1376400     Document Type: Article

References (12)

1. J. S. Blakemore, J. Appl. Phys. 53, R123 (1982).
2. H. G. Tompkins and W. A. McGahan, Spectroscapic Ellipsometry and Reflectometry (Wiley, New York, 1999).
3. D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 985 (1983).
4. G. E. Jellison and B. C. Sales, Appl. Opt. 30, 4310 (1991).
5. C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson, J. Appl. Phys. 83, 3323 (1998). This Herzinger-Johs model seems to be able to mimic any given dispersion in a Kramers-Kronig consistent fashion to any degree of precision (if a sufficient number of oscillator terms is used), but lacks physical background along with strong internal parameter correlation. Therefore, the parameters of this model are not reported here. On the other hand, the thickness of the oxide overlayer is not correlated to the parametric model parameters. This can be shown by fitting the 0.74-1.3 eV range assuming the optical constants for the native oxide as in Ref. 7 and a Cauchy model for the dispersion of GaAs below the gap. The accuracy of the surface layer thickness is about 0.5 Å.
6. D. E. Aspnes, G. P. Schwartz, G. J. Gualtieri, A. A. Studna, and B. Schwartz, J. Electrochem. Soc. 128, 590 (1981).
7. S. Zollner, Appl. Phys. Lett. 63, 2523 (1993).
8. G. E. Jellison, Opt. Mater. 1, 151 (1992).
9. J. W. Garland, C. K. Kim, H. Abad, and P. M. Raccah, Thin Solid Films 233, 148 (1993); Phys. Rev. B 41, 7602 (1990); C. K. Kim, J. W. Garland, H. Abad, and P. M. Raccah, ibid. 45, 11749 (1992).
10. J. W. Garland, C. K. Kim, H. Abad, and P. M. Raccah, Thin Solid Films 233, 148 (1993); Phys. Rev. B 41, 7602 (1990); C. K. Kim, J. W. Garland, H. Abad, and P. M. Raccah, ibid. 45, 11749 (1992).
11. J. W. Garland, C. K. Kim, H. Abad, and P. M. Raccah, Thin Solid Films 233, 148 (1993); Phys. Rev. B 41, 7602 (1990); C. K. Kim, J. W. Garland, H. Abad, and P. M. Raccah, ibid. 45, 11749 (1992).
12. 2 and the lack of a minus sign in my convention for the CP line shape, Eq. (1).