Surface detection and 3D profilometry for microstructure using optical metrology

Optics and Lasers in Engineering

Volumn 36, Issue 1, 2001, Pages 1-9

  Jin, Guan Chang ^a   Bao, Nai Keng ^b  

^a TSINGHUA UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

3D profilometry; Optical metrology of microstructure; Surface detection

Indexed keywords

CALIBRATION; MICROSTRUCTURE; PROFILOMETRY; SURFACE MEASUREMENT;

SURFACE DETECTION;

OPTICAL VARIABLES MEASUREMENT;

EID: 0035390375     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00047-1     Document Type: Article

References (7)

1. Shadow and projection moiré techniques for absolute or relative mapping of surface shapes
2. Surface inspection of automotive bodies by reflective computer vision
3. One-step phase shift 3-D surface profilometry with grating projection
4. A machine vision technique for human body metrology
5. Confocal laser microscopes see a wider field of application
6. Application of nondestructive testing method to electronic industry using computer-aided optical metrology
7. Applications of a novel phase-shift method using a computer-controlled polarization mechanism