Suppression of crack formation in garnet film by using a compound glass underlayer

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 2407-2410

  Furuya, A ^a   Baubet, C ^a   Yoshikawa, H ^a   Tanabe, T ^a   Yamamoto, M ^a   Tailhades, P ^b   Bouet, L ^b   Despax, C ^b   Presmanes, L ^b   Rousset, A ^b  

^a NTT CORPORATION   (Japan)

^b UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

Film cracking; Garnet; Glass; MO; Rapid anneal; Sputtering; Thermal expansion coefficient

Indexed keywords

COERCIVE FORCE; CRYSTALLINE MATERIALS; GARNETS; GLASS; HEAT TREATMENT; MAGNETIC FILMS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; THERMAL EFFECTS; THERMAL EXPANSION;

FILM CRACKING;

CRACK INITIATION;

EID: 0035386296     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.951187     Document Type: Article

References (19)

1. Advances in magneto-optics