Controlling garnet film composition by magnetic-field-controlled radio frequency magnetron sputtering

Journal of Applied Physics

Volumn 87, Issue 9 III, 2000, Pages 6776-6778

  Furuya, A ^a   Baubet, C ^a   Yoshikawa, H ^a   Tanabe, T ^a   Hirono, S ^a   Yamamoto, M ^a   Tailhades, P ^b   Bouet, L ^b   Despax, C ^b   Presmanes, L ^b   Rousset, A ^b  

^a NTT CORPORATION   (Japan)

^b UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000844806     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372838     Document Type: Article

References (16)

1. K. Shimokawa, H. Dohnomae, T. Mukai, H. Yamada, H. Matsuda, and M. Daimon, J. Magn. Magn. Mater. 154, 271 (1996).
2. R. Sato, N. Kawamura, and T. Tamaki, J. Magn. Soc. Jpn. 19, 185 (1995).
3. P. Papakonstantinou, B. Teggart, and R. Atkinson, J. Magn. Magn. Mater. 163, (1996).
4. M. Gomi, K. Kurishima, and M. Abe, J. Magn. Soc. Jpn. 11, 309 (1987).
5. K. Shono, S. Kuroda, H. Kano, N. Koshiro, and S. Ogawa, Mater. Res. Soc. Symp. Proc. 150, 131 (1989).
6. Y. Braik and H. Le Gall, J. Appl. Phys. 76, 7633 (1994).
7. P. Hansen and J. P. Krumme, Thin Solid Films 144, 69 (1984).
8. K. Shono, H. Kano, and S. Ogawa, J. Appl. Phys. 63, 3639 (1988).
9. A. Furuya, H. Yoshikawa, T. Ohkubo, M. Yamamoto, P. Tailhades, L. Bouet, C. Despax, L. Presmanes, and A. Rousset, J. Magn. Magn. Mater. 193, 143 (1999).
10. A. Furuya, H. Yoshikawa, T. Tanabe, M. Yamamoto, P. Tailhades, L. Bouet, C. Despax, L. Presmanes, and A. Rausset, J. Appl. Phys. 85, 5106 (1999).
11. M. Gomi, T. Okazaki, and M. Abe, IEEE Trans. Magn. MAG-23, 2967 (1987).
12. M. Gomi, T. Tanida, and M. Abe, J. Appl Phys. 57, 3888 (1985).
13. A. Furuya and S. Hirono, J. Appl. Phys. 68, 304 (1990).
14. N. Laegreid and G. K. Wehner, J. Appl. Phys. 32, 365 (1961).
15. M. L. Tarng and G. K. Wehner, J. Appl. Phys. 42, 2449 (1971).
16. Z. L. Liau, W. L. Brown, R. Homer, and J. M. Poate, Appl. Phys. Lett. 30, 626 (1977).