Structural investigation and wear resistance of submicron TiN coatings obtained by a hybrid plasma immersion ion implantation process

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 978-983

  Gunzel R ^a   Shevshenko, N ^b   Matz, W ^a   Mucklich A ^a   Celis, J P ^c  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Coatings; Cutting tools; Ion implantation; PIII; TiN

Indexed keywords

ANALYTICAL PROCEDURES AND TECHNIQUES; DEPOSITION; ION IMPLANTATION; LIFESPAN; MECHANICAL STRESS; PROTECTIVE AGENT; STAINLESS STEEL; TEMPERATURE; THICKNESS; TITANIUM NITRIDE;

DEPOSITION; ION IMPLANTATION; TITANIUM; WEAR RESISTANCE;

LARGE DIMENSIONAL ACCURACY;

COATING TECHNIQUES;

CUTTING TOOL; ION IMPLANTATION; PLASMA TREATMENT; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0035386102     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01216-6     Document Type: Article

References (12)

1. The use of plasma source ion implantation for wear protection