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Volumn 16, Issue 6, 2001, Pages 1541-1548
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Relationship between the microstructure and nanoindentation hardness of thermally evaporated and magnetron-sputtered electrochromic tungsten oxide films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ATOMIC FORCE MICROSCOPY;
CRYSTAL MICROSTRUCTURE;
CRYSTALLIZATION;
DENSIFICATION;
ELASTIC MODULI;
EVAPORATION;
GRAIN SIZE AND SHAPE;
HIGH TEMPERATURE EFFECTS;
INDENTATION;
MAGNETRON SPUTTERING;
MICROHARDNESS;
OXYGEN;
POLYCRYSTALLINE MATERIALS;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
REACTIVE THERMAL EVAPORATION (RTE);
TUNGSTEN COMPOUNDS;
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EID: 0035382261
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.2001.0214 Document Type: Article |
Times cited : (11)
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References (24)
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