Monte-Carlo simulation of laser ablated plasma for thin film deposition

Applied Surface Science

Volumn 177, Issue 1-2, 2001, Pages 15-21

  Franklin, Sushmita R ^a   Thareja, R K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

Carbon plasma; Laser produced plasma; Monte Carlo simulation; Thin films

Indexed keywords

CARBON; COMPUTER SIMULATION; DEPOSITION; LASER ABLATION; LASER PRODUCED PLASMAS; MONTE CARLO METHODS; SUBSTRATES; THIN FILMS;

LASER-INDUCED CARBON PLASMAS; THIN FILM DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0035370937     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00176-3     Document Type: Article

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