An economical solution for BEOL Post-ash residue removal

Solid State Technology

Volumn 44, Issue 6, 2001, Pages 68-72

  Loper, S ^a   Ma, W C ^a   Chang, L ^a   Lee, K ^a   Peter Kini, D ^a  

^a Surface Conditioning Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; ENVIRONMENTAL IMPACT; FLAMMABILITY; SOLVENTS; VOLATILE ORGANIC COMPOUNDS;

SEMI AQUEOUS SOLVENTS (SAS); WET CLEANING;

WSI CIRCUITS;

EID: 0035367406     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (4)

1. Optimizing filtration for solvent photoresist removal processes
2. Advanced wet and dry cleaning coming together for next generation
3. Characterization of metal corrosion in BEOL process
4. Lowering environmental impact of centrifugal spray acid processors