Growth of amorphous carbon films by carbon atom bombardment in the energy range 10-500 eV

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 180, Issue 1-4, 2001, Pages 145-152

  Yastrebov, Sergey ^a   Smith, Roger ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; COMPUTER SIMULATION; DENSIFICATION; FILM GROWTH; ION BOMBARDMENT; MOLECULAR DYNAMICS;

ATOM BOMBARDMENT;

AMORPHOUS FILMS;

EID: 0035363792     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00409-8     Document Type: Conference Paper

References (17)