Optical properties of β-FeSi2 precipitate layers in silicon

Optical Materials

Volumn 17, Issue 1-2, 2001, Pages 121-124

  Schuller, B ^a   Carius, R ^a   Lenk, S ^a   Mantl, S ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Decay time; Photoluminescence; Semiconducting iron disilicide; FeSi2

Indexed keywords

INFRARED SPECTROSCOPY; ION BOMBARDMENT; IRON COMPOUNDS; PHOTOLUMINESCENCE; PRECIPITATION (CHEMICAL); SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

SEMICONDUCTING IRON DISILICIDE;

OPTICAL FILMS;

EID: 0035361117     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(01)00033-7     Document Type: Conference Paper

References (12)