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Volumn 89, Issue 11 I, 2001, Pages 5991-5996

Charge states of divacancies in self-implanted doped Si

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Indexed keywords


EID: 0035356167     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1363682     Document Type: Article
Times cited : (7)

References (31)
  • 4
    • 84911790682 scopus 로고
    • edited by W. Paul North Holland, Amsterdam
    • P. T. Landsberg, in Handbook of Semiconductors, edited by W. Paul (North Holland, Amsterdam, 1982), Vol. 1.
    • (1982) Handbook of Semiconductors , vol.1
    • Landsberg, P.T.1
  • 9
    • 0029309343 scopus 로고
    • A listing of published specific trapping rates for Si divacancies can be found in Jpn. J. Appl. Phys., Part 1 34, 2197 (1995). In this article we used the values derived by P. Mascher, S. Dannefaer, and D. Kerr, Phys. Rev. B 40, 11764 (1989).
    • (1995) Jpn. J. Appl. Phys., Part 1 , vol.34 , pp. 2197
  • 10
    • 0001176545 scopus 로고
    • A listing of published specific trapping rates for Si divacancies can be found in Jpn. J. Appl. Phys., Part 1 34, 2197 (1995). In this article we used the values derived by P. Mascher, S. Dannefaer, and D. Kerr, Phys. Rev. B 40, 11764 (1989).
    • (1989) Phys. Rev. B , vol.40 , pp. 11764
    • Mascher, P.1    Dannefaer, S.2    Kerr, D.3
  • 11
    • 0000565974 scopus 로고    scopus 로고
    • d=1.05, the average of the theoretical and the experimental values. We also note that an interlaboratory comparison [R. D. Goldberg, A. P. Knights, P. J. Simpson, and P. G. Coleman, J. Appl. Phys. 86, 342 (1999)] indicates variations of order 0.005 are found for the same sample measured in various laboratories.
    • (1998) Phys. Rev. B , vol.57 , pp. 12911
    • Kauppinen, H.1    Corbel, C.2    Nissilä, J.3    Saarinen, K.4    Hautojärvi, P.5
  • 12
    • 0000638823 scopus 로고    scopus 로고
    • d=1.05, the average of the theoretical and the experimental values. We also note that an interlaboratory comparison [R. D. Goldberg, A. P. Knights, P. J. Simpson, and P. G. Coleman, J. Appl. Phys. 86, 342 (1999)] indicates variations of order 0.005 are found for the same sample measured in various laboratories.
    • (1998) Phys. Rev. B , vol.57 , pp. 7621
    • Hakala, M.1    Puska, M.J.2    Nieminen, R.M.3
  • 13
    • 0006860822 scopus 로고    scopus 로고
    • d=1.05, the average of the theoretical and the experimental values. We also note that an interlaboratory comparison [R. D. Goldberg, A. P. Knights, P. J. Simpson, and P. G. Coleman, J. Appl. Phys. 86, 342 (1999)] indicates variations of order 0.005 are found for the same sample measured in various laboratories.
    • (1999) J. Appl. Phys. , vol.86 , pp. 342
    • Goldberg, R.D.1    Knights, A.P.2    Simpson, P.J.3    Coleman, P.G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.