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Volumn 28, Issue 5, 2001, Pages 455-458

Laser diode interferometer used to measure displacements in large range with a nanometer accuracy

Author keywords

Interferometer; Laser diode; Nanometer measurement; Optical measurement; Photothermal modulation

Indexed keywords

DISTANCE MEASUREMENT; INTERFEROMETERS;

EID: 0035351529     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (11)

References (15)
  • 1
    • 69949166537 scopus 로고
    • Sinusoidal phase modulating interferometry for surface profile measurent
    • (1986) Appl. Opt. , vol.25 , Issue.18 , pp. 3137-3140
    • Sasaki, O.1    Okazaki, H.2
  • 2
    • 84975633490 scopus 로고
    • Sinusoidal phase modulating interferometer using optical fibers for displacement measurement
    • (1988) Appl. Opt. , vol.27 , Issue.19 , pp. 4139-4142
    • Sasaki, O.1    Takahashi, K.2
  • 3
    • 0000228509 scopus 로고
    • Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance
    • (1990) Opt. Eng. , vol.29 , Issue.12 , pp. 1511-1515
    • Sasaki, O.1    Takahashi, K.2    Suzuki, T.3
  • 6
    • 0031342973 scopus 로고    scopus 로고
    • A novel sinusoidal phase-modulating laser diode interferometer based on slowly-varying approximation
    • Chinese source
    • (1997) Acta Optica Sinica , vol.17 , Issue.11 , pp. 1528-1532
    • Wu, Y.F.1
  • 8
  • 12
    • 0000660332 scopus 로고    scopus 로고
    • Measurement of small vibration amplitudes of a rough surface by an interferometer with a self-pumped phase-conjugate mirror
    • (2000) Appl. Opt. , vol.39 , Issue.25 , pp. 4593-4597
    • Wang, X.Z.1    Sasaki, O.2    Suzuki, T.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.