|
Volumn 28, Issue 5, 2001, Pages 455-458
|
Laser diode interferometer used to measure displacements in large range with a nanometer accuracy
a a a a a a |
Author keywords
Interferometer; Laser diode; Nanometer measurement; Optical measurement; Photothermal modulation
|
Indexed keywords
DISTANCE MEASUREMENT;
INTERFEROMETERS;
LARGE-RANGE DISPLACEMENT MEASUREMENT;
LASER DIODE INTERFEROMETER;
NANOMETER-PRECISION DISPLACEMENT MEASUREMENT;
SEMICONDUCTOR LASERS;
|
EID: 0035351529
PISSN: 02587025
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (11)
|
References (15)
|